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OF PROKHOROV GENERAL PHYSICS INSTITUTE RAS

 
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FEI STRATA FIB 205
(Heterophase Optical Processes Laboratory)

Focused ion beam microscope Strata FIB 205.

Ion microscope with gallium liquid metal ion source.

The accelerating voltage of 5 kV to 20 kV
Resolution of 7 nm
Beam current of 1 pA to 20 nA
The current density of 100 A/cm2.

The system is equipped with a 5-axis motorized table 50x50 mm, gas injection system for the deposition of conductors and insulators, as well as for the etching of the samples.


 

 
 


 
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