Focused ion beam microscope Strata FIB 205.
Ion microscope with gallium liquid metal ion source.
The accelerating voltage of 5 kV to 20 kV
Resolution of 7 nm
Beam current of 1 pA to 20 nA
The current density of 100 A/cm2.
The system is equipped with a 5-axis motorized table 50x50 mm, gas injection system for the deposition of conductors and insulators, as well as for the etching of the samples.
|