The device is designed to study the field electron emission with nanometer spatial resolution. STFEM provides a measurement of 4 parameters of the surface of samples:
- Topography;
- The distribution of field electron emission;
- The distribution of the electron work function;
- The local conductivity.

Specifications:

• Voltage - 0.1 - 10 V.
• Emission current - 0.5-5 nA.
• The range of precise movement of the sample - up to 20 microns.
• The range of gross movements of the sample - up to 20 mm.
• Scan area - up to 2 × 2 um2.
• The number of measurement points (pixels) on the scan - 128 × 128.
• Resolution - 2 nm.

Measurement conditions:

Vacuum - up to about 10^-6 Torr
Temperature - 300 K.